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design and fabrication of pzt

Email or Username Forgot your username? Password Forgot your password? Keep me signed in. No SPIE account? Create an account Institutional Access:. The alert successfully saved. The alert did not successfully save.For developing freestanding piezoelectric microcantilevers with low resonant frequency, some critical mechanical considerations, especially cantilever bending, were given in this study.

Two strategies, using piezoelectric thick films and adding a stress compensation layer, were calculationally analyzed for mitigating the cantilever bending, and then was applied for the fabrication of PZT freestanding microcantilevers.

The freestanding microcantilevers fabricated with the micromachining process possessed the resonant frequency of This is a preview of subscription content, log in to check access. Rent this article via DeepDyve. Smart Mater Struct R1—R Smart Mater Struct J Appl Phys Int J Adv Manuf Technol — J Microelectromech Syst — Appl Phys Lett — Thin Solid Films — Proceeding of the 8th international workshop on micro and nanotechnology for power generation and energy conversion applications, Sendai, pp — Academic Press, London.

Google Scholar. Jpn J Appl Phys — Kirby RK Platinum——a thermal expansion reference material. Int J Thermophys — Meas Sci Technol Merhaut J Theory of electroacoustics.

McGraw-Hill, New York. J Am Ceram Soc — J Appl Phys — J Micromech Microeng — J Electroceram — J Eur Ceram Soc — Download references. Correspondence to Jinya Zhang. Reprints and Permissions. Cao, Z. Design and fabrication of PZT microcantilevers with freestanding structure. Microsyst Technol 17, — Download citation.Lead Zirconate Titanate oxide PZT thick films with thicknesses of up to 10 mm were developed using a modified sol-gel technique. Usually, the film thickness is less than 1 mm by conventional sol-gel processing, while the electrical charge accumulation which reveals the direct effect of piezoelectricity is proportional to the film thickness and therefore restricted.

Two approaches were adopted to conventional sol-gel processing — precursor concentration modulation and rapid thermal annealing. The thickness of each coating layer was about 0. In addition, the structure, surface morphology and physical properties were characterized by X-ray diffraction XRDscanning electron microscopy SEM and atomic force microscopy AFM and electrical performance.

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The dielectric constant and hysteresis loops were measured as electric characteristics. This study investigates the actuation and sensing performance of the vibrating structures with the piezoelectric thick film. Additionally, it generated an electrical signal of 60 mV pp as a sensor, while vibration was input by a shaker. The frequencies of the first two modes of the beam were compared with the theoretical values obtained by Euler-Bernoulli beam theory. The linearity of the actuation and sensing tests were also examined.

Piezoelectric materials are extensively adopted owing to their many desirable characteristics. First, they can transform electrical signals into mechanical deformation. Hence, they can serve as actuators. They can also transform mechanical deformation into electrical signals, and so can serve as sensors. Additionally, some piezoelectric materials can be miniaturized to produce films or nano-wires for further applications. These films are important components of both actuators and sensors in MEMS and micro-optical devices such as micropumps, atomic force microscopes AFMultrasonic micromotors [ 1 ], infrared IR detector arrays [ 2 ], micromixers [ 3 ], micromirrors, microrelaies [ 4 ], pressure microsensors [ 56 ] and stress microsensors [ 7 ].

The applications of piezoelectric films are myriad. Recently, piezoelectric materials with high remnant polarization have attracted much interest as they have great potential in the preparation of memory devices [ 8 ]. High-quality actuation and sensing materials are required for well-performing MEMS devices.

PZT can generate a ten times larger force and times larger acoustic power density than non-ferroelectric materials such as ZnO zinc oxide [ 9 ], SiO 2 quartz and AlN aluminum nitride [ 10 ]. Three popular methods exist for fabricating PZT films - thick-film printing [ 11 - 13 ], sputtering [ 1415 ] and sol-gel processing [ 16 - 19 ]. Sintering temperatures of over o C are required to yield adequate PZT particles.

Sputtering is another familiar approach for synthesizing PZT films, which are typically less than 1 micron thick.

Design and fabrication of PZT microcantilevers with freestanding structure

Post-deposition annealing of sputtered films is required to crystallize the ferroelectric structure of the material. Sol-gel processing is a wet chemical method for synthesizing and processing inorganic hybrid materials. This work is based on sol-gel processing because it has three advantages. Firstly, it allows the convenient control of the stoichiometric chemical composition of lead zirconate titanate. Finally, it can be used for mass production.

The sol-gel process is one of the most versatile and extensively employed techniques. Nevertheless, the piezoelectric characteristics of sol-gel-derived PZT films tend to be inferior to those of bulk PZT, mainly because of the small grain size of the derived PZT films, which, in turn, results from the homogeneous nucleation of many crystalline PZT nuclei during crystallization. The piezoelectric effects of the crystalline particles drop as the grain size declines.

Therefore, homogeneous nucleation must be prevented to ensure favorable ferroelectric properties. The second reason for the inferior film properties is the limited film thickness. The thickness of a film formed by conventional sol-gel processing typically does not reach 1 micron, while the charge accumulation associated with the material electric dipole is proportional to the film thickness. Restated, the finite thickness of the film restricts actuation strength and sensing performance.

Two techniques were applied to increase the thickness of PZT films and reduce the duration of the fabrication process - precursor concentration modulation [ 20 - 21 ] and rapid thermal treatment [ 22 ].Thanks for helping us catch any problems with articles on DeepDyve.

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design and fabrication of pzt

Include any more information that will help us locate the issue and fix it faster for you. Journal of MicromechatronicsVol. Also available online - www. The devices have been purposely designed for integration in small mobile micro-robots, aimed at performing co-operative precision manipulation and assembly tasks.

Concerning the actuation, multilayer piezoceramic components were developed and employed. The selected fabrication techniques for the grippers are shape deposition manufacturing of polymer and electro-discharge machining of stainless steel, and different alternatives have been investigated in order to select the optimal design. Several prototypes have been fabricated and preliminary experimental tests have been performed, both regarding the characterization and the grasping capabilities.

Keywords : Micromanipulation; shape deposition manufacturing; electro-discharge machining; tools. Journal of Micromechatronics — Brill. Enjoy affordable access to over 18 million articles from more than 15, peer-reviewed journals. Get unlimited, online access to over 18 million full-text articles from more than 15, scientific journals. See the journals in your area. Continue with Facebook.

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design and fabrication of pzt

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The PZT thin film on the silicon beam was used for driving source and detection. We obtained the PZT thin film with thickness of 3um by the sputtered. The report describes a design of the gyroscope and characteristics of the PZT thin film. Authors Close. Assign yourself or invite other person as author. It allow to create list of users contirbution.

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Assign to yourself. Assign to other user Search user Invite.Lead-Zirconium-Titanium oxide PZT is a piezoelectric ceramics with high piezoelectric constants often used as sensors and actuators. Our research objective in this area is to develop PZT thin-film micro-sensors and actuators.

One application is tiny acoustic actuators that fit into cochlea part of inner ear to generate significant acoustic stimulation as implantable hearing aids. Such actuators, when combined with shortened cochlear implant electrodes, have the advantage of better speech recognition in noisy environments.

Furthermore, the combined acoustic and electric cochlear implants will have coordinated post-surgical mapping, single device to care for, more effective acoustic stimulation, and no occlusive effects. We have been developing acoustic micro-actuators for intracochlear applications since Our research efforts include design, fabrication, prototyping, instrumentation, measurements, and animal tests. Some preliminary results are summarized as follows. Fig 2. Sol-gel process for PZT film. Layout Design.

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Figure 1 shows the cross sectional view of a PZT thin-film acoustic microactuator. The design consists of a silicon substrate, a diaphragm suspension, a PZT thin film, and a top and a bottom electrode.

When a voltage V t is applied across the PZT film, the contraction and extension of the PZT film cause the diaphragm to vibrate in the out-of-plane direction emitting pressure waves. Figure 2 shows the fabrication process. Next, PZT sol is deposited using spin coating Fig.

Design and fabrication of PZT microcantilevers with freestanding structure

To finish, a parylene layer is coated via vapor deposition. Figure 3 shows a photo of the fabricated PZT probe, revealing its small size. Figure 4 shows a cross-sectional view of the probe under SEM.

We see not only a diaphragm but also its many layers designed in Fig. Animal Tests. Acute animal tests were conducted using guinea pigs. Auditory brainstem response ABR was measured for natural hearing and with the PZT probe inserted in the basal turn of guinea pig cochlea Fig.

Experimental Measurements.

design and fabrication of pzt

We had thoroughly tested the microactuator in air and in water before the animal tests. Figure 6 shows the experimental setup in water.

The spectrum analyzer then processes the driving voltage and LDV measurement to obtain a frequency response function FRF. The measured FRF is then compared with that obtained in air.

Figure 7 compares the FRF measured in air and in water. When the probe is dipped in water, two things happened. First, the first natural frequency instantly drops from 80 kHz to 20 kHz due to an added mass effect. This occurs because water has infiltrated into the PZT thin film for the film is porous.A normal own goal also counts as the first goal scorer.

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Design and fabrication of PZT-actuated tools for micromanipulation

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